http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H065672-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_12d24c0a12c3ecdb6d9a47d623d96e76 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1992-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8921d9dfdc9463f180a04ced3bca99a |
| publicationDate | 1994-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H065672-A |
| titleOfInvention | Method for manufacturing semiconductor device |
| abstract | (57) [Abstract] [Purpose] When measuring the electrical characteristics of each semiconductor element with Kelvin-connected terminals before dividing the semiconductor substrate, Bring the voltage value obtained from the sense measurement terminal close to the true value. [Structure] With respect to the back surface electrode of the semiconductor substrate, the force measurement terminal is connected to a check table in contact with the back surface electrode, but the sense measurement terminal is brought into contact with a stopper electrode on the front surface that is at the same potential as the back surface electrode. The influence of the resistance of the check table and the contact resistance between the semiconductor substrate and the check table is prevented from entering the measured voltage value. |
| priorityDate | 1992-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 13.