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filingDate 1991-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 1994-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H0649942-B2
titleOfInvention Chemical vapor deposition method of copper metal film, selective etching method and synthesis method of Cu + 1 (β-diketonate) -olefin composite
priorityDate 1990-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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