http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0648774-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ff189407a3b0a78d323763190740c3a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C10-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C10-16 |
| filingDate | 1992-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_565290b3d52d5b4fe14d5e1cf20dc80f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f35d30663d6754d9677b789c9d0f97d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03e663cf9411098c5fb8564741c70f81 |
| publicationDate | 1994-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0648774-A |
| titleOfInvention | Glass ceramics and manufacturing method thereof |
| abstract | (57) [Summary] [Object] To provide a glass-ceramic having good machinability, which has a small coefficient of thermal expansion and a small amount of adsorption and desorption of a gas such as He, and a method for producing the same. [Constitution] The glass matrix contains fluorophlogopite microcrystals and LiO 2 -Al 2 O 3 -SiO 2 microcrystals, has a small coefficient of thermal expansion, and has a He adsorption and desorption amount of 1 × 10 -9 〜 10 × 10 -9 atm -A glass-ceramic having excellent machinability in the range of cc / sec, and a method for producing this glass-ceramic using an alkoxide compound. [Effect] It has become possible to use machinable glass-ceramics as a material for jigs and special substrates used in semiconductor-related fields. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2664993-C1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104876446-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010513187-A |
| priorityDate | 1992-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.