http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0641141-U
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/E04H5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1992-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1994-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0641141-U |
| titleOfInvention | Exhaust heat cooling structure of IC tester |
| abstract | (57) [Abstract] [Purpose] To facilitate the exhaust heat of the IC tester 1 installed in the downflow clean room. [Structure] The heat exchanger 2 is arranged at the bottom of the IC tester 1. The heat exchanger 2 comprises a plurality of heat exchange units 21, 22.2 3, and a plurality of fins 7 are attached to the flow path pipe 6 of each heat exchange unit. The flow path pipe 6 is detachably connected with the hose 3, and the exhaust heat air of the IC tester 1 is cooled by flowing water through the flow path pipe 6. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1163577-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08159515-A |
| priorityDate | 1992-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 |
Total number of triples: 14.