http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0639688-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-021 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 |
| filingDate | 1983-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1994-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0639688-B2 |
| titleOfInvention | Method of forming silicon thin film |
| priorityDate | 1983-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.