http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06340679-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac93f643b44e958763fd1234fe359e3f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-076 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-22 |
| filingDate | 1993-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecc8a9e251ab2e15033be91c61a998c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5af91201cc4eb9827f8204d81419159 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1b3235070d380df67429c596520193d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53d67797bc7adb0c83efbc27859ee5b7 |
| publicationDate | 1994-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06340679-A |
| titleOfInvention | Titanium Nitride Metal Organic Precursor |
| abstract | (57) [Abstract] [Objective] A metal organic precursor that can be used in a chemical vapor deposition method for forming a coating of titanium nitride on a substrate, or a thermal decomposition method for producing bulk titanium nitride, and a method for producing the same. A metal organic precursor represented by the formula: [Cl 2 TiNR] 2 where R is a monovalent alkyl or aryl group having 1 to about 12 carbon atoms. In a method of depositing a titanium nitride coating on the surface of a substrate, Formula: [Cl 2 TiNR] 2 where R is a monovalent alkyl or aryl group having 1 to about 12 carbon atoms. Heating the metal-organic precursor of to form a gaseous precursor and delivering said gaseous precursor to the substrate surface at a temperature sufficient to deposit a titanium nitride coating on the substrate surface. Method for depositing titanium nitride coating. |
| priorityDate | 1993-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.