http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06331654-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 1993-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c5fd3079854d04d336322c3a5b7b721 |
| publicationDate | 1994-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06331654-A |
| titleOfInvention | Method of manufacturing probe card |
| abstract | (57) [Abstract] [Purpose] A probe card that can perform electrical inspection on all IC chips at the same time as a semiconductor wafer without separating it from the semiconductor wafer and can significantly reduce the bare chip inspection time. A manufacturing method is provided. A method of manufacturing a probe card according to the present invention is a method of manufacturing a probe card, in which a large number of IC chips formed on a semiconductor wafer W are not separated and an electrical inspection is simultaneously performed on all the IC chips. After disposing the inspection substrate 11 having the connection terminals 11A corresponding to all the electrodes of the IC chip, and disposing the mask 20 on which the through hole pattern 20A corresponding to the connection terminals 11A is formed on the inspection substrate 11. The conductive polymer 30 having fluidity is supplied onto the mask 20, and then the conductive polymer 30 is extruded from the through hole pattern 20A to be integrated with the connection terminal 11A as the probe needle 12. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007250996-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013058465-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103443633-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001099864-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010003871-A |
| priorityDate | 1993-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.