| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-305 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02 |
| filingDate |
1994-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b312e477909c777312cdbe5404e12a8 |
| publicationDate |
1994-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06326165-A |
| titleOfInvention |
Method and system for non-contact test of wiring network |
| abstract |
(57) [Abstract] [Purpose] To provide a contactless test method and system that are simpler to manufacture and operate and are inexpensive. The method of measuring the electrical properties of an electrical device having an associated conductive structure involves the sequence of steps set forth below. First, using a low energy electron beam, Charge all conductors on the surface of the device (30 3). The individual conductors are sequentially irradiated with a focused low energy electron beam (304). The induced current signal when the focused electron beam is applied to each conductor is measured (305). Analyze the induced current measurement results obtained from individual conductors. The electrical characteristics of the device are then determined based on the analysis. A charge storage method and three capacitance test methods for defect detection, A short circuit evaluation method is realized. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6586952-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7526747-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005347773-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014092541-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7876113-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6618850-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6924482-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6931620-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7375538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7170056-B2 |
| priorityDate |
1993-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |