http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06326103-A

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publicationDate 1994-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H06326103-A
titleOfInvention Electronic component and manufacturing method thereof
abstract (57) [Summary] (Correction) [Purpose] To provide an electronic component having highly reliable metal wiring. [Structure] An amorphous thin film 3 formed on a substrate 1 and a metal wiring 2 formed on the surface of the amorphous thin film are provided, and a peak of a halo pattern appearing in a diffraction measurement of the amorphous thin film 3 is formed. It is characterized in that the corresponding interatomic distance and the interplanar spacing of a predetermined crystal plane defined by the first interatomic distance of the metal wiring 2 are substantially matched.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002151438-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008042199-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9905788-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6377138-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017045783-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012169516-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011155280-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100430684-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019196509-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005294321-A
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