abstract |
(57) [Summary] [Structure] A method for producing a fluorine-containing polymer thin film by irradiating a laser beam with at least one fluorine-substituted olefin gas as a raw material. By the method of the present invention, a fluorine-containing polymer thin film can be easily produced in a short time. Also, According to the method of the present invention, it is possible to form a highly pure and high-performance fluorine-containing polymer thin film, which is adhered uniformly and firmly on the surface of an object, with high yield and high efficiency. |