| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q80-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B9-1418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q10-045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q80-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q10-04 |
| filingDate |
1993-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_378e703f374e3822d5d467967f85127d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a24c515bd3fffc7d57e0c3062d4b2ba8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d0502b4b270e7f8d18c59bd8569df02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d08d596a6f9380af4a6ce78a3c7a370f |
| publicationDate |
1994-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06313847-A |
| titleOfInvention |
Cantilever type actuator, cantilever type probe, scanning tunneling microscope using the same, and information processing apparatus |
| abstract |
(57) [Summary] [Object] To provide a cantilever type actuator which is used in a scanning tunneling microscope or an information processing apparatus to which the microscope is applied and which can obtain a large amount of displacement with good controllability and has stable characteristics. A cantilever 2 having a pair of coil-shaped electrode layers 4 and 7 above and below an insulating layer 5 is formed on a substrate 1, and the electrode layer 4 and the electrode layer 7 are electrically connected via a through hole 6. A cantilever actuator that is connected to form one coil. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102887476-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006250913-A |
| priorityDate |
1993-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |