http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06308722-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1993-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27a8c7cc34b41e70590c66166b35e801 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4eb526dd1ede469835cc80c2e01abf2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45c252583cde8d06ccecefeda60d1649 |
| publicationDate | 1994-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06308722-A |
| titleOfInvention | Positive photoresist composition |
| abstract | (57) [Summary] (Modified) [Objective] To provide a positive photoresist composition capable of obtaining a resist pattern having high sensitivity and excellent in resolution, developability and heat resistance. In a positive photoresist composition containing an alkali-soluble substituted phenol novolac resin and a 1,2-quinonediazide compound, the novolak resin is m -Cresol or a mixture of m-cresol and a phenolic compound and a condensate of formaldehyde, and is defined by the following (1) in the 13 C-NMR spectrum of a deuterated dimethylsulfoxide solution of this resin. The X value is 0.4 or more. X = A / (A + B + C + D) (1) Here, A: 2,4-position and / or 2,4,6-position, B: m-cresol in which 4-position and / or 4,6-position, C: 2-position and / or 2,6-position, and D: 6-position are respectively bonded to other phenol nucleus with methylene. Represents the integral value of the peak of the methyl group in the nucleus. |
| priorityDate | 1993-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 193.