http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06302018-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-26 |
| filingDate | 1993-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f94d3af4f3c4de07de7501fe27dbf55a |
| publicationDate | 1994-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06302018-A |
| titleOfInvention | Method for manufacturing stamper having convex pattern |
| abstract | (57) [Summary] [Object] To form a highly accurate convex pattern (in the present invention, the width of an etched region is larger than that of a non-etched region). [Structure] A step of applying a resist (2) to the surface of a first substrate (1) (first step), a step of exposing the resist (2) to a predetermined pattern (second step), and a patterning to a predetermined pattern by development. Then, a step of manufacturing a resist master (third step), a step of etching using the patterned resist (2) as a protective layer (fourth step), and a step of removing the resist remaining in the etched semi-finished product (first step) In a process of manufacturing a stamper having a convex pattern, which comprises 5 steps), a negative resist of alkaline type is used as a resist and an alkaline developing solution is used as a developing solution to manufacture a stamper having a convex pattern. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003100625-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6874262-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7763417-B2 |
| priorityDate | 1993-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.