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filingDate 1993-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1994-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H06300731-A
titleOfInvention Oxygen sensor manufacturing method
abstract (57) [Abstract] [Purpose] To provide a method for manufacturing an oxygen sensor in which the ionic conductivity of a solid electrolyte plate and the electrical insulation of an insulating layer can be secured and the following four members are firmly and integrally joined. [Structure] A solid electrolyte plate 11 having a measurement electrode 12 and a reference electrode 15 on the front and back surfaces, a ventilation path forming plate 16, an insulating layer 21, and a heater base having a heating element 25 are manufactured by integral firing. As the solid electrolyte plate, a zirconia green sheet having a thickness of 50 to 300 μm is used, which is made of zirconia powder having an average particle size of 2.0 μm or less, 5 to 7 mol% of Y 2 O 3 and 0 to 5 parts by weight of alumina. The heater substrate has an average particle size of 1. An alumina green sheet composed of 0 μm or less alumina powder and 0 to 10 parts by weight of zirconia or yttria-stabilized zirconia and having a thickness four times or more that of the zirconia green sheet is used. The firing is performed at 1300 to 1600 ° C.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6676817-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013053906-A
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