| abstract |
(57) [Summary] [Structure] A tridentate β-ketoimine derivative represented by the following general formula (I) and an organometallic complex in which the ketoimine ligand is coordinated to a metal. [Chemical 1] In the formula, R 1 and R 2 are each a linear or branched alkyl group having 1 to 8 carbon atoms or a fluorinated alkyl group, R 1 3 is hydrogen or a linear alkyl group having 1 to 4 carbon atoms, and R 4 is an alkylene group having 1 to 5 carbon atoms. [Effect] Since the ligand has many coordination sites with the metal, it is difficult to form a multimer, and a stable complex in which absorption of moisture or carbon dioxide in the air does not easily occur can be obtained. Since it retains high volatility for a long time, it is useful as a raw material for film formation by the MOCVD method. |