| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H9-08 |
| filingDate |
1993-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5fbaa07b10659841aea80c84c4d9c5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb14a0a91a6f8bec8a4525f54adbc816 |
| publicationDate |
1994-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06297252-A |
| titleOfInvention |
Fine processing method and apparatus |
| abstract |
(57) [Summary] [Structure] A scanning tunneling microscope (STM) is used, the probe is brought close to the surface of the workpiece, and the probe and the surface of the workpiece are immersed in a liquid. A method and a device for finely processing the surface of a work by applying a voltage between a needle and the work. [Effect] It is possible to form minute projections and depressions on the order of nm to μm on the surface of the workpiece under the condition that it is chemically stable and does not require a vacuum device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1233412-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013167565-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1233412-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08257838-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140112559-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2818579-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013125658-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011039017-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013125658-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008243850-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6528807-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7170842-B2 |
| priorityDate |
1993-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |