http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06295944-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1993-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9c13b04493db6579b758001f94ec96f |
| publicationDate | 1994-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06295944-A |
| titleOfInvention | Semiconductor device and TDDB test method and TDDB test device using the same |
| abstract | (57) [Abstract] [Purpose] A semiconductor device, TD, which enables an efficient TDDB test by shortening the time spent for the TDDB test of the semiconductor device. A DB test method and a TDDB test apparatus are provided. A TDDB test method in which a current is simultaneously applied to a semiconductor device in which a plurality of MOS capacitors formed on a semiconductor substrate are connected in series and a plurality of MOS capacitors of the semiconductor device are simultaneously applied to observe a voltage value between the MOS capacitors. In addition, TD for observing the voltage value between a plurality of MOS capacitors A TDDB test device in which a DB test device is provided with breakdown judgment voltage values for the number of connected MOS capacitors. [Effect] Since the MOS capacitors are connected in series, a stress can be applied to many MOS capacitors at one time by causing a current to flow between the two terminals. By setting multiple breakdown voltage references, many M It is possible to judge the destruction of the OS capacitor. Therefore TDDB In the test, the time can be shortened. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103941171-A |
| priorityDate | 1993-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410510985 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140819 |
Total number of triples: 14.