http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06290729-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4eae9d8d306bda658cb1d886d9222015 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-252 |
| filingDate | 1993-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c4502d16b70400791264d9786adf65a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59b6ac8506a4147de6a897d9ca3f859c |
| publicationDate | 1994-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06290729-A |
| titleOfInvention | Energy analyzer |
| abstract | (57) [Abstract] [Purpose] To improve resolution while maintaining high sensitivity. [Structure] A primary electron beam emitted from an electron gun is dispersed in the x direction by a Wien filter (WF) 10 and irradiated on a sample 11. The electron beam transmitted through the sample 11 is further dispersed by the WF 12 in the y direction orthogonal to the x direction and detected by the two-dimensional detector 13. The two-dimensional detector 13 is, for example, a CCD whose surface is coated with a fluorescent material. Consists of a TV camera, etc. Therefore, the two-dimensional detector 1 The x direction of the image obtained in 3 shows the energy of the electron beam, and the y direction shows the amount of dispersion of each energy in the y direction. Therefore, if the desired energy x1 of the data detected by the two-dimensional detector 13 is integrated in the y direction, the energy loss due to the sample 11 at this energy can be obtained. |
| priorityDate | 1993-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.