| abstract |
(57) [Abstract] (Corrected) [Object] To provide a wear resistant coating that exhibits more excellent properties for tools, machine parts, recording media, and the like, and a method for forming the same. A wear-resistant coating film applied to the surface of a base material to improve the wear resistance of the surface of the base material, which comprises a group IVa element, a group Va element, a group VIa element, Al and Si. It includes an ultrafine particle structure layer in which at least two kinds of compounds selected from nitrides, oxides, carbides, carbonitrides or borides are mixed as crystal grains with a grain size of 20 nm or less, and the total film thickness is 0.1 to It is 15 μm. At the time of film formation, the components for forming the coating film to be applied to the base material are individually supplied, and the amount of each component continuously supplied at one time is one layer or more on the surface of the base material. The feed time and feed amount are controlled so that the amount is insufficient to form a coating, and this operation is repeated for each component to obtain a final abrasion resistant coating. |