| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8e6a13e4ae501eb40decf5732cf09c6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K2201-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K2201-061 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K1-062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-72 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate |
1994-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71cebd7634214b6dbd89c2cfb0c7a875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ff5e3f9a6e976e0f2111235010d68eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67d819179fb6fc8d0280c82d06b0e373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da9287ec72aba38c77f1149d7ce00a96 |
| publicationDate |
1994-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06273605-A |
| titleOfInvention |
Optical element repair method |
| abstract |
(57) [Summary] (Modified) [Purpose] To remove the multilayer coating of an optical element in a single step while maintaining the reflectance. The optical element comprises a substrate 10 having a main surface and a first multilayer coating 60 on the main surface, the multilayer coating alternating a plurality of first material layers and at least a plurality of second material layers. Including. Repair of an optical element having a peak reflectivity at the X-ray wavelength removes the first multilayer coating from the substrate and then This is done by forming a second multilayer coating having about the same composition and structure as the first multilayer coating so as to coat on the major surface. Removal of the first multi-layer coating is accomplished by dissolving most of the first multi-layer coating in a single etching solution, resulting in almost complete removal of the first multi-layer coating in a single etching step. The formation of the second multilayer coating is carried out so that the resulting repaired optical element exhibits a peak reflectance of at least 80% of the highest peak reflectance originally exhibited by the optical element. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012190964-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4566791-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006308483-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005308722-A |
| priorityDate |
1993-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |