| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q80-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-10 |
| filingDate |
1993-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d08d596a6f9380af4a6ce78a3c7a370f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_378e703f374e3822d5d467967f85127d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b90c99e5d940b58ba2120edf2151ddc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ffb1cbc62cca8995a7577057d0f155f |
| publicationDate |
1994-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06273160-A |
| titleOfInvention |
Cantilever actuator, scanning tunnel microscope and information processing apparatus using the same |
| abstract |
(57) [Abstract] [PROBLEMS] To provide a cantilever actuator used for a scanning tunneling microscope or an information processing device, which has reduced warpage and increased mechanical strength and durability. [Structure] In a fixed portion of a substrate 1 of a cantilever 2 formed by laminating a thin film piezoelectric material and a thin film electrode, the substrate 1 Is a cantilever type actuator in which the is retracted in a triangular shape in the length direction of the cantilever 2. |
| priorityDate |
1993-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |