| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6402b23ab8782152be47b3996e48a4a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
1993-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49795cdff51adc7bb999c15a00920332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa423d8f11ea1fbe0457118de39b86a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4618062037a93addb147dad6c2dc4ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e227b6d22e9b748c5cd56dc3911b2165 |
| publicationDate |
1994-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06267869-A |
| titleOfInvention |
Aluminum alloy thin film forming equipment |
| abstract |
(57) [Summary] [Object] To provide an apparatus for forming an aluminum alloy thin film capable of forming a high quality alloy thin film by supplying each source gas at an optimum temperature. [Structure] The forming apparatus includes a reaction container 10 for forming an alloy thin film by chemical vapor deposition, and bubblers 20, 30. The raw material gas generated in the bubbler 20 is supplied to the supply nozzle 14 The raw material gas generated in the bubbler 30 is separately introduced into the reaction vessel 10 via the supply nozzle 15. During film formation, the susceptor 11 that supports the substrate 12 Are reciprocated by the belt conveyor 16. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003502878-A |
| priorityDate |
1993-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |