| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd23ef28fbaec3bb07f40d0af79f7f98 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01R33-76 |
| filingDate |
1993-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c9b4b01d620c5b148f4236a8299ad57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22d5e51bfea61d4630cb5c57b36fc45a |
| publicationDate |
1994-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06260541-A |
| titleOfInvention |
Semiconductor chip socket |
| abstract |
(57) [Abstract] [Purpose] In a semiconductor chip socket in which the stage part and the probe part are united to enable a single semiconductor chip burn-in test, the chip can be accurately positioned and oxidation of the chip electrode can be prevented. Eliminates contact loss between the tip electrode and the probe needle due to thermal expansion. [Structure] After mounting a semiconductor chip on the stage unit 10, the probe unit 12 is covered from above and the two are united by using the setting lever 14. The positional relationship between the probe needle and the chip electrode can be observed with a microscope through a glass plate provided in the probe unit, and the position of the chip can be finely adjusted by the XY stage inside the stage unit 10. The space around the chip is made airtight by an O-ring, and the metal parts of the stage part and the probe part are made of a low coefficient of thermal expansion alloy. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5468897-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012191241-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013219299-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108535628-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007278860-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100953560-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007121222-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4574588-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007285970-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9088201-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0897259-A |
| priorityDate |
1993-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |