| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33dafb5bbc2ec47ebcb7becbbe60f704 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-30 |
| filingDate |
1993-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffd1a7e65930c83f1215bcfc45a4b8ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72ab6ea0b54de9c3f1b9541e563138a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dccf7ec3208d569dcb7a5a006e1a8e5 |
| publicationDate |
1994-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06258509-A |
| titleOfInvention |
Microstructure fabrication method |
| abstract |
(57) [Summary] [Objective] To provide a method for stably producing a fine structure with simple equipment and processes. A method for producing a microstructure, which comprises photopolymerizing a compound by irradiating a substrate having a photopolymerizable compound layer such as phenylacetylene with linearly polarized coherent light (for example, excimer laser light). The above photopolymerizable compound layer adsorbs the photopolymerizable compound on the substrate surface, It is provided by impregnation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004359344-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4539129-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8586158-B2 |
| priorityDate |
1993-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |