| abstract |
(57) [Abstract] [Purpose] To provide optimum oxidation conditions when forming an oxide film on the surface of a metal wiring used in an electronic circuit by anodic oxidation. [Structure] When anodizing a metal wiring such as aluminum, tantalum, titanium, etc., the temperature of the solvent is cooled to 10 ° C. or lower, preferably 0 ° C. or lower, and the anodic oxidation is performed to obtain a uniform surface oxidation rate. Therefore, it is possible to obtain a material which has little unevenness and is most suitable for the purpose of electronic circuit wiring. |