| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07B63-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00 |
| filingDate |
1993-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_913d3644026597818b8c3fe047046364
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_923a44c9ffc5559edfad9d5860954b57 |
| publicationDate |
1994-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06247977-A |
| titleOfInvention |
Purification method of solid organometallic filled in container |
| abstract |
(57) [Summary] (Corrected) [Constitution] Before using the organometallic solid filled at room temperature at room temperature as a raw material for chemical vapor deposition, part of the organometallic previously filled in the container is used. A method for purifying a solid organic metal filled in a container, which comprises sublimation and removal. [Effect] It is possible to supply an organometallic gas having a low oxygen impurity content. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016145170-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019104659-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0816530-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5951820-A |
| priorityDate |
1993-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |