http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06244128-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 |
| filingDate | 1993-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbd4f2b4095bb6490993b3d1458147e8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08844fb29070cbec0aae69141a7fe028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_feed225748435ac51ec8b1b6acd29c4e |
| publicationDate | 1994-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06244128-A |
| titleOfInvention | Method for forming electrode on p-type semiconductor substrate |
| abstract | (57) [Abstract] [Purpose] Reproduction is performed by exposing a desired portion of a p-type II-VI group semiconductor substrate to plasma containing one or more acceptor impurity elements, and then forming a metal electrode thereon. A p-type ohmic electrode having good contact and low contact resistance is formed on a II-VI group semiconductor substrate. [Structure] A high concentration region of N is formed in the vicinity of the surface of the ZnSe substrate 1 by exposing the p-type ZnSe substrate 1 to a nitrogen plasma 4, and Au is sputter-deposited thereon to form an ohmic electrode. . The desired pattern region of the ZnSe substrate 1 which is not protected by the resist 3 is exposed to the generated nitrogen plasma 4 and, as a result, is sputter-etched and at the same time a large amount of N is added near the substrate surface. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6709958-B2 |
| priorityDate | 1993-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.