http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06230295-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
| filingDate | 1993-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_731f63bdc9fe2eee564221714ae8804a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16af9aaf04fe918d5912e29aaa6755a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c66aba382b98b0f92a69c5d166d6f216 |
| publicationDate | 1994-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06230295-A |
| titleOfInvention | Optical deflector, manufacturing method thereof, and display device using optical deflector |
| abstract | (57) [Abstract] [Purpose] A drive voltage can be reduced, a deflection angle can be made large, and miniaturization and arraying are easy. [Structure] A substrate 1 having a V-shaped groove 10 on one side thereof is provided, and a fixed electrode 14 is provided on the upper surface of the substrate 1 via an insulating layer 13. And the fixed electrode 15 is provided at a predetermined position. On the upper surface of the insulating layer 13, the mechanical movable portion 11 supported by the supporting portion 18 is provided. Are provided on both end surfaces of the insulating layer 13 via spacers 16, respectively, and the mechanical movable portion 11 is A void 111 is formed between the insulating layer 13 and the upper surface of the insulating layer 13. The mechanical movable portion 11 includes a mirror 11a as a light deflection plate and beams 11b formed at both ends of the mirror 11a. One end of b is supported by the support portion 18. The support 18, the beam 11b, and the mirror 11a are made of an electric conductor thin film. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006346830-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07199102-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6903487-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005164861-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002214550-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010026535-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100400223-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002258178-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7567018-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6747390-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4580826-B2 |
| priorityDate | 1993-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.