http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06230036-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cd2b27efa87484ce8b01a1cb58ed003 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 1993-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5376092c901b426a92e5f95bcb200c20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3212431e52aaad40d1d2ae4d5bace6a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d340622c0f394b1a135971bbb3ed7cb0 |
| publicationDate | 1994-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06230036-A |
| titleOfInvention | Probe substrate, method of manufacturing the same, and method of using the same |
| abstract | (57) [Abstract] [Purpose] To obtain a probe substrate that reliably guides a signal from a semiconductor test device to an object to be inspected, a manufacturing method thereof, and a usage method thereof. [Structure] Wiring layers 1b1 and 1b2 are formed on one surface of a base film 1a so as to have a required pattern, and bump electrodes 1d2 are formed at a position near one end of the wiring layer and corresponding to an electrode pad to be inspected. , 1d3 and bump electrodes 1d1, 1d4 for electrically exchanging signals with the semiconductor test device are formed near the other end of the wiring layer, and the wiring film 1 completed by this step is formed. The probe substrate was completed by mounting it on the base material 2, and the balloon 6 was placed on the opening 2 a of the base material 2. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000227446-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08220140-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105445135-A |
| priorityDate | 1993-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9397 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419573697 |
Total number of triples: 19.