http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0620951-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 1991-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_913d3644026597818b8c3fe047046364 |
| publicationDate | 1994-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0620951-A |
| titleOfInvention | Container for metalorganic vaporization |
| abstract | (57) [Summary] [Structure] In a container for vaporizing an organic metal, comprising a mechanism of introducing a carrier gas into a liquid organic metal filled in the container, vaporizing the organic metal into the carrier gas, and then discharging it to the outside of the container. , A carrier impregnated with a liquid organic metal is present in the container, and the carrier gas is introduced into the carrier gas introduction pipe so as to pass through the voids of the carrier without being discharged into the liquid phase of the organic metal and to be discharged to the outside of the container. An organic metal vaporization container having an opening arranged near the bottom of the container. [Effect] Even if the amount of gas supplied to the vapor phase growth apparatus is small, or even if the concentration of the liquid organic metal used is high, there is no pulsating flow in the gas flow, and there is little fluctuation in the concentration of the organic metal contained in the carrier gas. Made possible. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013127121-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010116616-A |
| priorityDate | 1991-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 58.