| abstract |
(57) [Summary] [Purpose] It is possible to reduce the amount of paramagnetic defects generated during excimer laser irradiation. [Constitution] In the direct flame hydrolysis method, as a raw material, An alkoxysilane compound having the chemical formula R 1 n Si (OR 2 ) 4-n (wherein R 1 and R 2 are the same or different aliphatic monovalent hydrocarbon groups, and n is an integer of 0 to 3) is used. To produce quartz glass. |