http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06192826-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 |
| filingDate | 1992-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2dbb3617b94b414ce217d6037a17121 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7741a0bda695a04ea5c7fffb686d7a52 |
| publicationDate | 1994-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06192826-A |
| titleOfInvention | Deposited film and method for forming the same |
| abstract | (57) [Summary] [Purpose] To obtain a uniform deposited film by reactive sputtering at a high speed on a large area substrate. [Structure] A target 116 containing at least one of constituent elements of a deposited film and a microwave introduction window 113 are provided inside a vacuum container, and the shortest distance between the target and the microwave introduction window is 50 to 200 mm. The microwave is introduced through the microwave introduction window to generate a plasma by irradiating the reactive gas with a microwave whose electric field direction is parallel to the target surface, and the target surface is irradiated with ions in the plasma. The deposit is separated from the target, Deposition in which the material to be deposited is made to fly and adhered to the surface of the substrate 104 facing the target, and the material to be deposited and the radicals in the plasma react to form a deposited film containing the constituent elements of the reactive gas. Membrane generator. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112281128-A |
| priorityDate | 1992-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.