| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa625bc8a2ef54c47cbb91b855516727 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-4721 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-952 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21C17-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-952
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 |
| filingDate |
1993-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f17ea2e13675d73bdecdbd91e18a9816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf51323dbc948bf8d7c363e4a59c0327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65b6d7589c5b901ad6abce5098f9a567
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e6e8c678b4f2129a9fe7cf51dc06080 |
| publicationDate |
1994-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06167455-A |
| titleOfInvention |
Inspection of cylindrical objects |
| abstract |
(57) [Abstract] [PROBLEMS] To provide a method and apparatus for inspecting the surface of a cylindrical object for defects. Constitution: Means 41, 42 for rotating the object to be inspected about its axis and objects 5, 4 while the object is rotating An incident beam of radiation 3 to form a spot on the surface of And a means 7 for translating the spot formed by the projection means with respect to the rotating object. Means 9 for detecting a scattered beam 6 of radiation consisting of 9, 83 and an incident beam of radiation after scattering by the surface of the object And means 13, 15 and 17 for deriving information about the surface depth of the object to be inspected in the portion where the incident beam spot is formed from the detection result of the detection means. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017009323-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006242838-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6980301-B2 |
| priorityDate |
1992-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |