http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06145987-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
| filingDate | 1993-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dcf85b77b877c8e4177582c7a96d732 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e782efc32edcc90215675f77807d59e9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e77558ad7ade7bed5f01e1ba73dddc2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32fc5ccb1f1aca374e6814feafd3aa83 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eaaefdc2df8c04d65de38dd0fd9dc0f8 |
| publicationDate | 1994-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06145987-A |
| titleOfInvention | Method for forming titanium-based film |
| abstract | (57) [Summary] [Structure] A method for forming a titanium-based film by forming a titanium-based film on a substrate by a CVD method using a gas containing an organic titanium compound and a reducing gas. [Effect] The substrate on which the titanium-based film is formed is kept at a temperature slightly higher than the decomposition temperature of the raw material gas used, and the raw material gas containing the above-mentioned organic titanium compound is reacted to cause decomposition temperature near the substrate. The raw material gas heated to the above can be decomposed, and titanium atoms can be deposited on the substrate to form a film. The organic compound generated by the decomposition is sublimated by the heat of the heated substrate. Therefore, a titanium-based film having good coverage and few impurities can be formed by a low temperature process. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003277930-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019003695-A1 |
| priorityDate | 1992-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.