| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_58b5b5f6ef1f29c255ed464e7fc37a4c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00 |
| filingDate |
1992-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99b1da72f0650bd66149370826fbe75f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8633b540632058443c300b3ed71c16f0 |
| publicationDate |
1994-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H06145177-A |
| titleOfInvention |
Purification method of organometallic compounds |
| abstract |
(57) [Abstract] [Purpose] To improve the purity of an organometallic compound, which is a raw material for the organometallic vapor phase epitaxy used in the production of compound semiconductors and the like. [Structure] An organic metal compound is characterized in that an organic metal compound is heated to remove impurities having a low boiling point using an inert carrier gas, and impurities in the carrier gas are measured over time to monitor the purification condition. A method for purifying a metal compound. [Effect] A low boiling point impurity in an organometallic compound can be efficiently removed even by an inexperienced person. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008184419-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1616872-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1616872-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100861207-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016145170-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012062331-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7112691-B2 |
| priorityDate |
1992-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |