http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06135711-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-36 |
| filingDate | 1992-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fde7881761fabf27b16c365364998578 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e52c0679dd5c60031b4030509e2a4536 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6dddb71c82925f46f5eee0245a44380a |
| publicationDate | 1994-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06135711-A |
| titleOfInvention | Method for manufacturing silicon carbide film |
| abstract | (57) [Abstract] [Purpose] The present invention relates to a method for forming a silicon carbide film on a substrate surface kept at a low temperature under normal pressure. [Structure] In a method of heating a raw material gas composed of silicon halide, carbon halide and hydrogen at atmospheric pressure and forming a silicon carbide film by the generated active species, carbon halide has a biased molecular structure and charge distribution. A silicon carbide thin film is produced at a low temperature by using a material having a bias. At this time, the substrate temperature or the ambient temperature in the vicinity of the substrate is 140 ° C. which is a temperature lower than the decomposition temperature of the raw material gas. The temperature is 250 ° C. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105143503-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018135603-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016507001-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014097280-A1 |
| priorityDate | 1992-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.