http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06102234-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9772a8e55046288ba4602b2f27aea856 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6dd74b20fbf2e0ebf10c7bfad4f6c8c5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-41 |
| filingDate | 1992-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87807055d68d51eea1df1ba84b816166 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c86219fed4fdd4ee971d19bbfb442f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e7c3b47b6cc8087643e420671939e4d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bc52129722dc94b0300f478f257a02c |
| publicationDate | 1994-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06102234-A |
| titleOfInvention | Limiting current type oxygen sensor |
| abstract | (57) [Summary] [Objective] An object of the present invention is to provide a thin film type limiting current type oxygen sensor which realizes excellent thermal efficiency and excellent limiting current characteristics. A ZrO 2 —Y 2 O 3 film 13 is formed on a silicon substrate 11 via a silicon oxide film 12, and a cathode electrode 14 and an anode electrode 15 which mesh with each other in a comb pattern are formed on the ZrO 2 —Y 2 O 3 film 13. Gas diffusion layer 16 Is formed, and the heater electrode 17 is further disposed on this. The heater electrode 17 is formed in a meandering pattern so as to cover the gap between the cathode electrode 14 and the anode electrode 15, and the cathode electrode 14 and the anode electrode 15 of the ZrO 2 —Y 2 O 3 film 13 where ion conduction actually occurs. The part located between is effectively heated. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7201831-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8080142-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2385668-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2385668-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8900429-B2 |
| priorityDate | 1992-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.