http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0587747-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_78e55f376028937200b6696f8485227c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-20 |
| filingDate | 1991-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33777102807d5122591d52319e46b829 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_803a760eeaedf97650e9998707322964 |
| publicationDate | 1993-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0587747-A |
| titleOfInvention | Energy dispersive total reflection in-plane thin film X-ray diffraction method |
| abstract | (57) [Summary] [Object] The present invention is an X-ray crystal structure analysis method for a thin film, wherein X-ray scattering from the substrate is caused by the total reflection effect at the boundary between the thin film and the substrate. By suppressing the line as much as possible, it became possible to evaluate the in-plane structure of the ultrathin film by improving the S / N ratio. An energy dispersive X-ray diffractometer with a fixed optical system can be incorporated into a vacuum device or the like. Construction The main parts of the device are shown in FIG. White X Source, triaxial slit system consisting of total reflection angle setting slit and incident angle setting solar slit, substrate rotating mechanism, The solid X-ray detector is the main structure. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0578387-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5285934-A |
| priorityDate | 1991-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.