| abstract |
(57) [Abstract] [Purpose] The tip of the sharp metal wire is a monolayer, The other portion is covered with the laminated film, and the molecule having conductivity is present on the surface portion of the laminated thin film, so that the probe has excellent durability and a simple manufacturing method. [Configuration] CCl 3 Si (CH 2 ) 2 (CF 2 ) 6 (C The non-aqueous solvent of the silane coupling agent such as H 2 ) 2 SiCl 3 is brought into contact with the tungsten wire 1 to cause a dehydrochlorination reaction, and the monomolecular film 2 is washed with the non-aqueous solvent and washed with water. To form. By repeating this operation 5 times, a monolayer laminated film 4 of 5 layers is obtained. Then, the tip portion is subjected to an ashing treatment in oxygen plasma to remove the monomolecular laminated film only in the tip portion 5 and to react the silane coupling agent having a thiophene at the end, thereby covering the outermost layer with the conductive polythiophene 3. .. |