| abstract |
(57) [Summary] (Correction) [Purpose] To provide a silicon carbide fiber capable of reducing the free carbon content without taking in oxygen because an infusibilizing step is unnecessary. [Structure] Silicon, nitrogen and carbon as essential components, oxygen, Hydrogen and a metal element selected from Al, B, Ti, Zr, Hf, and Y are arbitrary components, and the ratio of each element is represented by an atomic ratio, N / Si = 0.01 to 1, C / Si = 0. 1-1. 5, O / Si = 0.3 or less, M / Si = 0.002- 0.5 (selected from M: B, Al, Ti, Zr, Hf, and Y), H / Si = 0.1 or less, and substantially amorphous silicon or nitrogen and carbon, or silicon, Amorphous consisting of nitrogen and carbon and β-S with crystal grain size of 500Å or less It is composed of an aggregate or mixed system of iC crystalline fine particles, and has a small angle X-ray scattering intensity ratio to air of 1 ° and 0.5. The silicon carbide fibers are characterized in that they are each 1 to 20 times in °. |