http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0579981-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1991-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fb51e5088c3f3919a783d50f7011809 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0164984f4aa60ffbdc8c65f553d7db0f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0c69ec4e85dcce153f39c8627278206 |
| publicationDate | 1993-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0579981-A |
| titleOfInvention | Method for measuring chlorine atom concentration |
| abstract | (57) [Abstract] [Purpose] In the measurement of chlorine atom concentration in a plasma processing apparatus, an absolute value of fluorescence intensity can be measured, and a measurement method capable of comparing chlorine atom concentrations in a plurality of plasma processing apparatuses is provided. To do. [Structure] First, a pulse laser beam having a wavelength range of 230 to 245 nm is irradiated into a plasma processing apparatus in which chlorine-based gas plasma is generated to excite two-photon resonance excitation of chlorine atoms in a ground state, and a wavelength range from the excited chlorine atoms is excited. 725-990nm While detecting the fluorescence of, the carbon tetrachloride gas is introduced into the plasma processing apparatus in which the excitation source is stopped, and the fluorescence of chlorine atoms is excited and detected using the laser light, and these chlorine-based gas plasmas and four Laser-induced fluorescence intensities of chlorine atoms in two cases of carbon chloride gas are compared. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017228671-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113533290-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113711033-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113533290-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113711033-B |
| priorityDate | 1991-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.