http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0572556-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 1991-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2034d70571284d0f65602b1ec4d8cf88 |
| publicationDate | 1993-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0572556-A |
| titleOfInvention | Active matrix substrate and method of manufacturing active matrix substrate |
| abstract | (57) [Summary] [Purpose] A silicon thin film different from the pixel transistor Provided is a method for manufacturing an active matrix in which a driving circuit formed of a thin film transistor having excellent electric characteristics is formed on an insulating substrate by crystallization by laser irradiation. [Structure] Silicon layers having different film thicknesses and film qualities are formed by different steps of forming active silicon layers of thin film transistors for pixels and driving circuits which form an active matrix substrate. A silicon layer for a driving circuit is crystallized by laser irradiation to form an electrically excellent driving circuit. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05190853-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8551827-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8389984-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7561660-B2 |
| priorityDate | 1991-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.