http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0572299-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302 |
filingDate | 1992-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3b20edb6474e92db0713c641745d7e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a25f07f5dcec2450f62553b10f9c79bd |
publicationDate | 1993-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H0572299-A |
titleOfInvention | Method and apparatus for measuring voltage signal of integrated circuit |
abstract | (57) [Summary] [Purpose] To improve the reproducibility of measurement and enable measurement of absolute voltage and waveform amplitude required for waveform comparison. [Structure] To determine the separation distance between the probe and the circuit to be measured, both are brought close to each other by a fine movement mechanism, and the probe is positioned by a desired distance based on the contact point, and the probe is positioned with high accuracy. To this end, means for detecting a slight contact between the probe and the circuit under measurement with high sensitivity is provided. Also, first, without operating the circuit under test, A known low-frequency voltage signal is input to the input / output or power supply terminal of the circuit, and the light intensity change measured by irradiating the probe with laser light with the probe in contact with the wiring connected to that terminal , At the same measurement point, the probe is separated from the circuit under test by a desired distance, and the change in light intensity is measured by irradiating the probe with laser light. At an arbitrary measurement point of the circuit, the absolute voltage at the measurement point is obtained from the light intensity change measured by irradiating the probe with laser light in a state where the probe is separated from the circuit to be measured by a desired distance. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017159869-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017159869-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6232765-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6567760-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6166845-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0616239-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5552716-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6288529-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6201235-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6087838-A |
priorityDate | 1991-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.