http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0555201-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-32 |
| filingDate | 1991-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe66511ce148e472549f7fb121434e81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6ccd7503877bf79591e6f1b0c825963 |
| publicationDate | 1993-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0555201-A |
| titleOfInvention | Insulating film for semiconductor and the method of forming them |
| abstract | (57) [Abstract] [PROBLEMS] To provide an insulating film, a planarizing film, and a method for forming the same, which are improved in degassing, shrinkage, and hygroscopicity when heated at high temperature, for semiconductor multilayer wiring. A polyorganosilsesquioxane having a methyl group or a phenyl group as a side chain, having a number average molecular weight of 500 to 10,000, a hydroxyl group of 0.3 to 6% by weight as an end group, and an alkoxy group 0.9 to 16% by weight An organic solvent solution of what is contained is coated on the wiring of the substrate and cured by heating. [Effect] It is excellent in flattening and can be heat-cured at a relatively low temperature. Curing shrinkage is small, the completion of curing reaction is high, and degassing and shrinkage at high temperature heating are small. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0160881-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109111151-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6787625-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6774202-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0160880-A3 |
| priorityDate | 1991-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.