| abstract |
(57) [Abstract] [Purpose] A process control method and a control device therefor that allow an output to quickly, stably and accurately follow a required load even if the response amount of the control amount is large and the response characteristic is non-linear. [Structure] A process control device includes a basic program circuit (830) that creates a basic target command (Frdo) for a process operation amount from a load command (Ld), and a deviation between a detected process control amount and a control amount set value ( A correction circuit (820) for creating a correction signal from ET) and a basic target command (Frdo) And an acceleration circuit (410) that corrects the load. The acceleration circuit (410) receives the load command (Ld) and the deviation (ET) as input, and accelerates the acceleration signal to minimize the deviation. (AFrd) is created. This accelerating circuit (410) is constructed from, for example, a neural network or using fuzzy inference. |