http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0547330-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cd96399ca1b128b00ca0d3b053945afb http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate | 1991-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9610edff1663b1b756a4a8c59298c324 |
| publicationDate | 1993-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0547330-A |
| titleOfInvention | Ion source head |
| abstract | (57) [Abstract] [Purpose] The purpose of the ion source head, which is a part of the ion implanter that emits ions, is to extend the life of the filament of the source head. In an ion source head, which is a part that emits ions in an ion implanter, a first chamber having a filament 2 for generating thermoelectrons therein is connected to the first chamber, and the thermoelectrons are connected. A second chamber that takes in the gas, collides with the gas injected from the gas injection port 4 to generate plasma, and emits the plasma from the window 10, and through the filament 2 on the side of the second chamber. A reflector 5 provided on the opposite side for moving the thermoelectrons to the second chamber side, and a target 6 provided around the window 10 of the second chamber for attracting the thermoelectrons. To configure. |
| priorityDate | 1991-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23969 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548998 |
Total number of triples: 16.