http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05326850-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822 |
| filingDate | 1992-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d31693333f0fc46967b8d3d241b47501 |
| publicationDate | 1993-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05326850-A |
| titleOfInvention | Semiconductor device |
| abstract | (57) [Abstract] [Purpose] To provide a semiconductor device for reliability evaluation for guaranteeing a chip of a semiconductor integrated circuit. [Structure] 1Al-2Al interlayer insulating film breakdown check pattern formed by intersecting 1Al and 2Al, and a structure in which a resistance element is connected to 1Al and / or 2Al in series is connected in series or in parallel, A semiconductor device for chip assurance with one end terminated by a pair of aluminum pads. For example, as shown in FIG. 1, each of the sensor units A to E is connected through the resistance elements A to D arranged in order between the first aluminum wirings 11. [Effect] By arranging the sensor and the resistance connected to it so as to correspond to each other, it is possible to make a determination regardless of the package mounted, and it is possible to simplify the test pattern, which is a disadvantage. The investigation of can be done quickly. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4728628-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102967813-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006148001-A |
| priorityDate | 1992-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268 |
Total number of triples: 18.