http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05316596-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e35abc32880aa48b0f2c574ff66d21c7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R17-00 |
| filingDate | 1992-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf8a27f362e6bfb0a30cebe6197cb233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b6f4b7f0ac49d5e4fc9b482a9826e4d |
| publicationDate | 1993-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05316596-A |
| titleOfInvention | Thin film array ultrasonic transducer and its forming method |
| abstract | (57) [Abstract] [Objective] The object of the present invention is to devise an array element forming method, It is an object of the present invention to provide a thin film array ultrasonic transducer composed of array elements having a fine pitch. A thin-film array ultrasonic transducer in which a plurality of fine ultrasonic transducers including a lower electrode film, a piezoelectric thin film, and an upper electrode film are arranged in an array on the surface of an acoustic medium and formed in close contact with each other. A material having a low crystallinity is grown in advance at a position corresponding to a groove forming portion between the array elements, and a groove between the array elements is formed by etching in a portion made of the material having a low crystallinity. And a method for forming the thin film array ultrasonic transducer. |
| priorityDate | 1992-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.