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publicationDate 1993-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H05294636-A
titleOfInvention CVD raw material for fluoride glass
abstract (57) [Summary] [Objective] It is possible to obtain a CVD raw material for fluoride glass, which has improved composition controllability and is capable of synthesizing a fluoride glass having good characteristics with high reproducibility and at high speed. [Structure] Each of the pentafluoropropanoyl pivaloylmethanate derivatives of the component metals is mixed in a target component ratio, and this mixture is mixed in a mixed solvent of tetrahydrofuran and isopropyl alcohol (boiling point 82.5 ° C.) in a volume ratio of 1: 1. Was dissolved so that the entire solute was 0.3 mol% to obtain a CVD raw material for fluoride glass. Zirconium-based fluoride glass (55ZrF 4 -25BaF 2 -5LaF) by the CVD method using carbon tetrafluoride as a reaction gas. 3 -15YF 3) was synthesized.
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