http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05281717-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-037 |
| filingDate | 1992-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1993-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05281717-A |
| titleOfInvention | Photosensitive substance, heat-resistant positive photoresist composition containing the same, photosensitive substrate, and pattern forming method |
| abstract | (57) [Summary] [Purpose] A heat-resistant positive photoresist composition which can sufficiently cope with any structure of a photosensitive resin component and has excellent sensitivity and resolution, and a composition using the composition Provided are a photosensitive substrate and a pattern forming method. [Structure] A resin composition such as a polyimide precursor having a specific structure containing a compound exhibiting basicity upon irradiation with an actinic ray near the lower limit of the visible region of 400 nm or more provides a photoresist composition having good heat resistance. It can be obtained, and when a pattern is formed using a photosensitive substrate obtained by coating this composition on a substrate, a good pattern is formed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009265637-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7371506-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6048663-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6403289-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5886136-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8877427-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6160081-A |
| priorityDate | 1992-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 61.